|
氣氛
Atmosphere
|
爐溫（℃）
Furnace
|
表麵負荷
（W/cm2）
Surface Load
|
對元件的影響
Effect On Elements
|
解決辦法
Solution
|
|
氨
|
1290
|
3.8
|
與sic作用生成甲烷減少sio2保護膜（mó） Decreasing SiO2 protective film by Acting with SiC to generate Methane
|
露點激活
Make it active at dew point
|
|
CO₂
|
1450
|
3.1
|
腐蝕（shí）碳化矽（guī） Attacking sic
|
用石英管保（bǎo）護
Protecting by quartz tube
|
|
18%CO
|
1500
|
4.0
|
無影響 No
|
|
|
20%CO
|
130
|
3.8
|
吸附碳粒影響sio2保護膜 Affecting SiO2 protective film by Adsorbing C grains
|
|
|
鹵素（sù）
|
704
|
3.8
|
腐蝕碳化矽減少sio2保護膜 Decreasing SiO2 protective film by eroding SiC
|
用石英（yīng）管保護
Protecting by quartz tube
|
|
碳氫化合物
|
1310
|
3.1
|
吸附碳粒致熱汙染，分解的碳（tàn）沉積，易造成電氣（qì）故障 Causing hot pollution by adsorbing C grains
|
送進（jìn）充分的空氣
Filling with plenty of air
|
|
氫
|
1290
|
3.1
|
與sic作用反應生成（chéng）甲烷，減少sic2保護膜 Decreasing SiO2 protective film by Acting with SiC to generate Methane
|
露（lù）點激活
Make it Active at dew point
|
|
甲烷
|
1370
|
3.1
|
吸附碳粒致熱汙染 Causing hot pollution by adsorbing C grains
|
|
|
N
|
1370
|
3.1
|
與sic反應（yīng）形成氮化矽（guī）絕緣 Generating SiN insulating layer by acting with SiC
|
|
|
Na
|
1310
|
3.8
|
侵蝕碳化矽（guī） Eroding sic
|
用石英管保（bǎo）護
Protecting by quartz tube
|
|
SO2
|
1310
|
3.8
|
侵蝕碳化矽 Eroding sic
|
用石英管保護
Protecting by quartz tube
|
|
真（zhēn）空
|
1204
|
3.8
|
|
|
|
氧
|
1310
|
3.8
|
碳化矽被氧化 Sic oxidized
|
|
|
水（shuǐ）（不同含量（liàng））
|
1090-1370
|
3.1-3.6
|
與sic作用生成矽的水化物（wù）
Generating hydrate of silicon by acting on SiC
|
|
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